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Effect Of No On The Electrical Characteristics Of SiO2 Grown On P-Type 4H SiC
Published online by Cambridge University Press: 10 February 2011
Abstract
In this paper the effect of NO nitridation on the electrical characteristics of the oxides grown on p-type 4H SiC has been investigated. The results show that NO nitrided oxide has a lower interfacial trap density and a lower net oxide charge compared to N2 annealed oxides.
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- Copyright © Materials Research Society 1998