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Deposition And Characterization of CNx Films

Published online by Cambridge University Press:  21 February 2011

X. T. Cui ,
Z. H. Zhang ,
Q. Y. Chen ,
F. Romero-Borja ,
J. R. Liu ,
Z. S. Zheng ,
D. W. Pan ,
L. T. Wood  and
W. K. Chu
X. T. Cui
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
Z. H. Zhang
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
Q. Y. Chen
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
F. Romero-Borja
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
J. R. Liu
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
Z. S. Zheng
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
D. W. Pan
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
L. T. Wood
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
W. K. Chu
Affiliation:
Department of Physics and Texas Center for Superconductivity at, University of Houston, Houston, TX 77204–5932, USA
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Abstract

CNx films with x around 1.0 have been made by inverted cylindrical DC magnetron sputtering. RBS, XPS, IR spectroscopy, ERD and SEM were used to characterize the composition and bonding properties of the films, while X-ray diffraction was used for crystal structure determination. XPS data indicated the existence of the tetrahedral C3N4 phase in the CNx films, which was consistent with the C-N single bond suggested by IR spectra. The annealing effect on CNx films will also be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 339: Symposium D – Diamond, Silicon Carbide and Nitride Wide Bandgap Semiconductors , 1994 , 515
Copyright
Copyright © Materials Research Society 1994

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References

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