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The Causes of Property Variations of Ibad-Titanium Nitride

Published online by Cambridge University Press:  25 February 2011

R. A. Kant ,
S. A. Dillich ,
B. D. Sartwell  and
J. A. Sprague
R. A. Kant
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375
S. A. Dillich
Affiliation:
Worcester Polytechnic Institute, Worcester, MA 01609
B. D. Sartwell
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375
J. A. Sprague
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375
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Abstract

The influence of the growth conditions on the composition, microstructure, and mechanical properties of TiN formed with low energy Ar+ ion bombardment during reactive physical vapor deposition was studied. The ratios of the incident ion and atom fluxes at the growth surface were varied systematically and were found to have a strong influence on both the composition and the microstructure of the films. These changes correlated well with measured changes in mechanical and optical properties. The films were examined using Auger electron spectroscopy, transmission electron microscopy, and their mechanical properties were studied using hardness, friction, and wear testing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 128: Symposium A – Processing and Characterization of Materials Using Ion Beams , 1988 , 427
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

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