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Carbon-Rich a-SiC:H Alloys as Dielectric Materials: Injection Mechanisms in Mim-Type Structures
Published online by Cambridge University Press: 01 January 1993
Abstract
Electronic properties of C-rich a-Si1 -xCx:H alloys are investigated through the characterization of MIM-type structures, by means of current-voltage measurements carried out at different temperatures. These measurements provide some new insight in both the dielectric behavior of the material and the physics of the metal/a-Si1-xCx:H junction.
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- Research Article
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- Copyright © Materials Research Society 1993
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