Electron backscatter diffraction is a powerful technique that has gained momentum in materials science research over the last ten years. Recent advances in electron microscope technology and automation has made EBSD a more viable and routine analytical tool.

Sample preparation is a key component in the use of EBSD due to the nature of the backscattered signal. Pattern formation is from the top 10-50 nm of the sample surface, and therefore, mechanical damage remaining from sample preparation will result in a poor quality signal. Several methods of sample preparation have been investigated that vary in abrasive material used, preparation time, and material system. Some approaches have used a combinatorial approach of silicon carbide papers, aluminum oxide papers, and aluminum oxide suspension with a polishing cloth to prepare tantalum.