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Inspecting Surfaces With a Sharp Stick: Scanning Probe Microscopy - Past, Present, and Future

Published online by Cambridge University Press:  14 March 2018

Paul West
Paul West*
Affiliation:
Pacific Nanotechnology, Inc.
*
[email protected]

Extract

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With the growing emphasis on nanotechnology, scanning probe microscopy (SPM) is emerging from the surface science laboratories and becoming a mainstream inspection and metrology tool along side optical and SEM microscopes. Scanning probe instrumentation and applications evolved dramatically during the past quarter-century (Table I). By 1998 SPM-related papers were being published at the rateof nearly 5000 per year Here we review the history of scanning probe microscopy, describe its current role as a critical enabler in nanotechnology, discuss why it has become a routine laboratory tool, and present a view of future directions for this advanced technology.

Type
Research Article
Information
Microscopy Today , Volume 11 , Issue 2 , April 2003 , pp. 5 - 9
Copyright
Copyright © Microscopy Society of America 2003

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