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Gradient Reference Specimens for Advanced Scanned Probe Microscopy†
Published online by Cambridge University Press: 14 March 2018
Extract
Scanned Probe Microscopy (SPM) techniques are attractive because they provide easily acquired micrographs that map specimen properties with nanometer scale resolution. SPM micrographs can be collected without the use of high vacuum (as opposed to many electron microscopies). Moreover, SPM methods allow in-situ imaging of specimens in a variety of environments, including under liquids and at higher temperatures. However, from a metrology perspective, the great promise of SPM must be balanced by the fact that SPM techniques generally provide qualitative data unless supplementary actions are taken. That is, quantification of SPM image contrast is difficult since it depends highly upon probe characteristics, probe/ sample interactions (both of which can be difficult Eo gauge), and instrument calibration.
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- Copyright © Microscopy Society of America 2004
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Contribution of the National Institute of Standards and Technology, not subject to copyright in the United States.
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