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A Compact Field Emission SEM for Low Voltage Imaging

Published online by Cambridge University Press:  14 March 2018

Jim Rynne
Jim Rynne*
Affiliation:
Novelx, Inc., Lafayette, CA
*
[email protected]

Extract

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A disruptive innovation in how scanning electron microscopes (SEMs) are designed and built has produced a low cost, but highperformance compact field emission SEM. By leveraging silicon processing technologies, Novelx has miniaturized the core technology inside a SEM. This miniaturization enabled the design of an all-electrostatic electron beam column that when coupled with a thermal field emission (TFE) electron source is optimized for lowvoltage imaging and sub-10nm resolution. In addition, the mySEM© has a quad-segmented microchannel plate (MCP) detector that has a topographic imaging mode that is capable of electron channeling contrast imaging (ECCI) at low imaging voltages. These capabilities were previously only available in high-end and much larger sized field emission SEMs outfitted with additional detectors. The Novelx mySEM show in Fig. 1 is now being used in material science and life science applications for characterizing a variety of energy sensitive nanomaterials, biomaterials and thin films.

Type
Research Article
Information
Microscopy Today , Volume 17 , Issue 2 , March 2009 , pp. 34 - 37
Copyright
Copyright © Microscopy Society of America 2009

References

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