It has been long recognized that the understanding of mechanical properties of thin films on substrates requires an understanding of the stresses in the film structures as well as a knowledge of mechanisms by which thin films deform. It has also been shown that these stresses may compromise the performance of integrated circuits, magnetic media, etc. The presence of residual and thermal stresses between the matrix and intergranular films in structural multiphase ceramics is the most common mechanism of failure that often causes deformation and fracture

In this paper, the effect of residual stress on mechanical properties of silicate-glass films on single-crystal α-Al2O3 substrates has been studied with AFM with the emphasis on the changes in surface morphology associated with the film strain and relaxation. The deformation of thin layers of glass on crystalline materials has also been examined using newly developed experimental methods for nanomechanical testing.

In several mechanical wear situations, e.g., those involving biomaterials and applications of mechanochemical polishing, a surface experiences simultaneous tribological loading and corrosive chemical exposure; the combination can greatly increase wear rates. We examine the exposure of single crystal calcite [CaCO3], dolomite [MgCa(CO3)2], and brushite[CaHPO4.2H2O] to buffered aqueous solutions and mechanical stimulation with an Scanning Force Microscope (SFM) tip. Silicon nitride tips are used with applied normal loads from 0-300 nN, tip radii ∼30 nm and tip velocities from 1-200 μm/s. We present the influence of normal force, tip velocity, and solution chemistry on the rates of corrosive wear of calcite and dolomite. Images of the wear of atomic steps can be used to examine the wear rates and propagation of dissolution around the stimulated region. Mechanical stimulation includes small area scans, linear reciprocation, and indentation. A diagram of wear by linear reciprocation of the SFM tip and typical results on single crystal calcite are shown in Figs. 1 and 2, respectively.