We have fabricated amorphous thin-film specimens
containing light elements (B, C, N, O, F, and Mg) in addition to
silicon, and have measured their composition using electron energy-loss
spectroscopy (EELS). The films appear to be stable during storage in
air and during irradiation by an electron beam, for doses below
105 C/cm2. Used with a transmission electron
microscope fitted with an energy-dispersive X-ray (EDX) detector, they
provide a convenient means of determining light-element
k-factors for X-ray microanalysis. For a TEM equipped with an
electron energy-loss spectrometer, the specimens can also be used to
check the EELS instrumentation and elemental-quantification procedures.