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Calibration Specimens for Determining Energy-Dispersive X-ray k-Factors of Boron, Nitrogen, Oxygen, and Fluorine

Published online by Cambridge University Press:  31 July 2002

M. Malac  and
R. F. Egerton
M. Malac
Affiliation:
Department of Physics, University of Alberta, Edmonton, Canada
R. F. Egerton
Affiliation:
Department of Physics, University of Alberta, Edmonton, Canada
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Abstract

We have fabricated amorphous thin-film specimens containing light elements (B, C, N, O, F, and Mg) in addition to silicon, and have measured their composition using electron energy-loss spectroscopy (EELS). The films appear to be stable during storage in air and during irradiation by an electron beam, for doses below 105 C/cm2. Used with a transmission electron microscope fitted with an energy-dispersive X-ray (EDX) detector, they provide a convenient means of determining light-element k-factors for X-ray microanalysis. For a TEM equipped with an electron energy-loss spectrometer, the specimens can also be used to check the EELS instrumentation and elemental-quantification procedures.

Type
Articles
Information
Microscopy and Microanalysis , Volume 5 , Issue 1 , January 1999 , pp. 29 - 38
Copyright
1999 Microscopy Society of America

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