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Using Auger, EDS, and FIB to Detect, Identify, and Image Buried Metallic Particles

Published online by Cambridge University Press:  30 July 2020

Ashley Ellsworth  and
Dennis Paul
Ashley Ellsworth
Affiliation:
Physical Electronics, Chanhassen, Minnesota, United States
Dennis Paul
Affiliation:
Physical Electronics, Chanhassen, Minnesota, United States

Abstract

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Type
Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens - Surface Analysis and Spectroscopy I - Chemical State, Kinetics and Reactions
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1570
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Copyright
Copyright © Microscopy Society of America 2020

References

Joshi, A., Paul, D. F.. 2019. ASM Handbook, Volume 10, Materials Characterization. Auger Electron Spectroscopy. ASM Handbook Committee.Google Scholar