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Transmission Electron Microscopy Study of FeHfN Thin Films for Magnetic Properties Optimization and Integration Above Silicon Circuits.

Published online by Cambridge University Press:  01 August 2005

R Pantel ,
S Couderc ,
P Ancey ,
C Wyon  and
B Viala
R Pantel
Affiliation:
STMicroelectronics,Crolles France
S Couderc
Affiliation:
STMicroelectronics,Crolles France
P Ancey
Affiliation:
STMicroelectronics,Crolles France
C Wyon
Affiliation:
STMicroelectronics,Crolles France
B Viala
Affiliation:
LETI CEA Grenoble,France

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 1804 - 1805
Copyright
© 2005 Microscopy Society of America