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Transmission Electron Microscope Observation of Charge Distribution on Insulating Thin Films by Hydro-carbon Deposition

Published online by Cambridge University Press:  04 August 2017

Ken Harada ,
Keiko Shimada ,
Kodai Niitsu ,
Teiji Katsuta ,
Teruaki Ohno  and
Daisuke Shindo
Ken Harada
Affiliation:
CEMS, RIKEN (The Institute of Physical and Chemical Research), Hatoyama, Saitama, Japan
Keiko Shimada
Affiliation:
CEMS, RIKEN (The Institute of Physical and Chemical Research), Hatoyama, Saitama, Japan
Kodai Niitsu
Affiliation:
CEMS, RIKEN (The Institute of Physical and Chemical Research), Hatoyama, Saitama, Japan
Teiji Katsuta
Affiliation:
Vacuum Device Inc., Mito, Ibaraki, Japan
Teruaki Ohno
Affiliation:
Tecnex Lab., Machida, Tokyo, Japan
Daisuke Shindo
Affiliation:
CEMS, RIKEN (The Institute of Physical and Chemical Research), Hatoyama, Saitama, Japan IMRAM, Tohoku University, Sendai, Miyagi, Japan

Abstract

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Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1826 - 1827
Copyright
© Microscopy Society of America 2017 

References

[1] Reimer, L. Scanning Electron Microscopy. Springer Berlin 2013). p. 162.Google Scholar
[2] Reimer, L. & Kohl, H. Transmission Electron Microscopy. Springer Berlin 2010). p. 484.Google Scholar
[3] Fourie, J. T. Optik 44 1975). p. 111.Google Scholar
[4] Hren, J. J. Ultramicroscopy 1 1979). p. 375.Google Scholar
[5] The authors would like to thank A. Hisada of Hitachi Ltd., S. Nomoto of Hitachi High-Tech Fielding Corp., and K. Tamura and T. Yaguchi of Hitachi High-Technologies Corp. for their technical support.Google Scholar