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TEM Study Of Silicide Formation And Microstructural Development Of Ni/ Si1-xGex

Published online by Cambridge University Press:  22 July 2003

X. Chen ,
S. K. Banerjee ,
J. P. Zhou  and
L. Rabenberg
X. Chen
Affiliation:
Microelectronics Research Center, The University of Texas at Austin, Austin, TX 78712, US
S. K. Banerjee
Affiliation:
Microelectronics Research Center, The University of Texas at Austin, Austin, TX 78712, US
J. P. Zhou
Affiliation:
Texas Materials Institute, The University of Texas at Austin, Austin TX 78712, US
L. Rabenberg
Affiliation:
Texas Materials Institute, The University of Texas at Austin, Austin TX 78712, US

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 508 - 509
Copyright
Copyright © Microscopy Society of America 2003