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TEM investigation of MoSeC films

Published online by Cambridge University Press:  03 October 2008

C. Silviu Sandu ,
Tomas Polcar  and
Albano Cavaleiro
C. Silviu Sandu
Affiliation:
ICEMS - Mechanical Engineering Department, University of Coimbra, Polo 2, 3030-788 Coimbra, Portugal EPFL – Ecole Polytechnique Federale de Lausanne, CH-1015 Lausanne, Switzerland
Tomas Polcar
Affiliation:
ICEMS - Mechanical Engineering Department, University of Coimbra, Polo 2, 3030-788 Coimbra, Portugal Department of Control Engineering, Faculty of Electrical Engineering, Czech Technical University in Prague, Technická 2, Prague 6, Czech Republic
Albano Cavaleiro*
Affiliation:
ICEMS - Mechanical Engineering Department, University of Coimbra, Polo 2, 3030-788 Coimbra, Portugal
*
Corresponding author. E-mail: [email protected]

Abstract

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Transition metal dichalcogenides (TMD) are widely used as self-lubricating material either as oil additive or directly as thin films. Magnetron sputtering is a deposition method allowing depositing such films with high density and adhesion. However, their spread use in practical applications is still hindered since their excellent sliding properties are deteriorated in the presence of humidity and under high contact pressures. MoSe2, one of the members of TMD family recently studied, has been co-sputtered with carbon in order to improve the mechanical and tribological properties when compared to pure MoSe2 films.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 14 , Supplement S3 , September 2008 , pp. 7 - 10
Copyright
Copyright © Microscopy Society of America 2008