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Targeted Ion Milling of Ex Situ Lift-Out FIB Specimens

Published online by Cambridge University Press:  04 August 2017

C.S. Bonifacio ,
M.J. Campin ,
P. Nowakowski ,
M. Boccabella ,
L.A. Giannuzzi  and
P.E. Fischione
C.S. Bonifacio
Affiliation:
E.A. Fischione Instruments Inc., Export, PA 15632USA
M.J. Campin
Affiliation:
E.A. Fischione Instruments Inc., Export, PA 15632USA
P. Nowakowski
Affiliation:
E.A. Fischione Instruments Inc., Export, PA 15632USA
M. Boccabella
Affiliation:
E.A. Fischione Instruments Inc., Export, PA 15632USA
L.A. Giannuzzi
Affiliation:
EXpressLO LLC, Lehigh Acres, FL 33971USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments Inc., Export, PA 15632USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 268 - 269
Copyright
© Microscopy Society of America 2017 

References

[1] Giannuzzi, LA & Stevie, FA Micron 30 1999). p. 197.Google Scholar
[2] Giannuzzi, LA, et al, Microscopy and Microanalysis 21 2015). p. 1034.Google Scholar
[3] Unocic, KA MJ Mills, and GSDaehn, Journal of Microscopy 240 2010). p. 227.Google Scholar
[4] Cerchiara, RR, et al, Microscopy Today 19 2011). p. 16.Google Scholar
[5] Giannuzzi, LA, Geurts, R & Ringnalda, J Microscopy and Microanalysis 11 2005). p. 828.Google Scholar
[6] Ishitani, T., et al, Journal of Vacuum Science and Technology B 16 1998). p. 1907.Google Scholar
[7] LA Giannuzzi would like to thank TSS Microscopy for granting access to the FIB 200 used in this work.Google Scholar