Hostname: page-component-cd9895bd7-p9bg8 Total loading time: 0 Render date: 2024-12-25T02:11:29.194Z Has data issue: false hasContentIssue false
  • English
  • Français

Sub-50nm Metrology Control in the Fabrication Processing of Quartz-based Nanoimprint Templates by Variable Pressure SEM Imaging

Published online by Cambridge University Press:  01 August 2005

D Drouin ,
E Lavallée ,
M Cloutier ,
L K Mun ,
J Beauvais  and
B Griffin
D Drouin
Affiliation:
Quantiscript Inc., Quebec, Canada
E Lavallée
Affiliation:
Quantiscript Inc., Quebec, Canada
M Cloutier
Affiliation:
Quantiscript Inc., Quebec, Canada
L K Mun
Affiliation:
Quantiscript Inc., Quebec, Canada
J Beauvais
Affiliation:
Quantiscript Inc., Quebec, Canada
B Griffin
Affiliation:
University of Western Australia

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 394 - 395
Copyright
© 2005 Microscopy Society of America