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Strain Measurement of 3D Structured Nanodevices by EBSD

Published online by Cambridge University Press:  04 August 2017

William Osborn ,
Lawrence H. Friedman  and
Mark Vaudin
William Osborn
Affiliation:
Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, MD.
Lawrence H. Friedman
Affiliation:
Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, MD.
Mark Vaudin
Affiliation:
Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, MD.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1422 - 1423
Copyright
© Microscopy Society of America 2017 

References

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[3] Villarrubia, JS, Vladar, AE & Postek, MT Surf Interface Anal 37 2005). p. 951.CrossRefGoogle Scholar