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Specimen Preparation Considerations for 2D Dopant Profile Determination in Semiconductor Devices by Electron Holography

Published online by Cambridge University Press:  24 July 2003

Kil-Soo Ko ,
Ji-Ping Zhou  and
Lew. Rabenberg
Kil-Soo Ko
Affiliation:
Texas Materials Institute, The University of Texas at Austin, Austin, TX 78712
Ji-Ping Zhou
Affiliation:
Texas Materials Institute, The University of Texas at Austin, Austin, TX 78712
Lew. Rabenberg
Affiliation:
Texas Materials Institute, The University of Texas at Austin, Austin, TX 78712

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 812 - 813
Copyright
Copyright © Microscopy Society of America 2003