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Scanning Electron Microscope Point Spread Function Determination Through the Use of Particle Dispersions

Published online by Cambridge University Press:  04 August 2017

Matthew D. Zotta
Affiliation:
Colleges of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA Nanojehm Inc., Albany, NY, USA
Eric Lifshin
Affiliation:
Colleges of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Kandel, Y.P., et al, Microscopy and Microanalysis 21(S3 2015). p 699.Google Scholar
[2] Lifshin, E., Kandel, Y.P. & Moore, R.L. Microscopy and Microanalysis 20(1 2014). p 78.Google Scholar
[3] Lifshin, E., et al, Microscopy and Microanalysis 20(S3 2014). p 12.Google Scholar
[4] Lifshin, E., et al, Microscopy and Microanalysis 2o(s3 2014). p 386.Google Scholar
[5] Zotta, M.D., et al, Microscopy and Microanalysis 21(S3 2015). p 33.Google Scholar