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Sample Preparation for Precise and Quantitative Electron Holography Analysis of Electrostatic Potential in Semiconductor Devices

Published online by Cambridge University Press:  01 August 2005

M-G Han ,
J Li ,
B Xie ,
P Fejes ,
J Conner ,
B Taylor  and
M R McCartney
M-G Han
Affiliation:
Arizona State University
J Li
Affiliation:
Arizona State University
B Xie
Affiliation:
Freescale Semiconductor Inc., Temple, Arizona
P Fejes
Affiliation:
Freescale Semiconductor Inc., Temple, Arizona
J Conner
Affiliation:
Freescale Semiconductors, Inc., Austin, Texas
B Taylor
Affiliation:
Freescale Semiconductor Inc., Temple, Arizona
M R McCartney
Affiliation:
Arizona State University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 586 - 587
Copyright
© 2005 Microscopy Society of America