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Recent Advances in 2D and 3D TOF SIMS Analysis of Organic and Inorganic Surfaces

Published online by Cambridge University Press:  30 July 2020

Felix Kollmer ,
Alexander Pirkl ,
Sven Kayser ,
Henrik Arlinghaus ,
Rudolf Moellers ,
Nathan Havercroft  and
Ewald Niehuis
Felix Kollmer
Affiliation:
IONTOF GmbH, Münster, Nordrhein-Westfalen, Germany
Alexander Pirkl
Affiliation:
IONTOF GmbH, Münster, Nordrhein-Westfalen, Germany
Sven Kayser
Affiliation:
IONTOF GmbH, Münster, Nordrhein-Westfalen, Germany
Henrik Arlinghaus
Affiliation:
IONTOF GmbH, Münster, Nordrhein-Westfalen, Germany
Rudolf Moellers
Affiliation:
IONTOF GmbH, Münster, Nordrhein-Westfalen, Germany
Nathan Havercroft
Affiliation:
IONTOF USA, Inc., Chestnut Ridge, New York, United States
Ewald Niehuis
Affiliation:
IONTOF GmbH, Münster, Nordrhein-Westfalen, Germany

Abstract

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Type
X-ray, Electron and Synchrotron-Based X-ray Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 76 - 77
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Copyright
Copyright © Microscopy Society of America 2020

References

Kollmer, F., Paul, W., Krehl, M. and Niehuis, E. (2013), Ultra high spatial resolution SIMS with cluster ions — approaching the physical limits. Surf. Interface Anal., 45: 312–314. doi:10.1002/sia.5093CrossRefGoogle Scholar
Sijbrandij, S., Lombardi, A., Sireuil, A., Khanom, F., Lewis, B., Guillermier, C., Notte, J. (2019). NanoFab SIMS: High Spatial Resolution Imaging and Analysis Using Inert-Gas Ion Beams. Microscopy Today, 27(3), 22–27. doi:10.1017/S1551929519000440CrossRefGoogle Scholar
Gilmore, I. S., SIMS of organics—Advances in 2D and 3D imaging and future outlook, Journal of Vacuum Science & Technology A 31, 050819 (2013); https://doi.org/10.1116/1.4816935CrossRefGoogle Scholar
Passarelli, , et al. Nature Methods volume 14, pp 1175–1183 (2017)10.1038/nmeth.4504CrossRefGoogle Scholar