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Radial Interference Contrast in in-situ SEM Observation of Metal Oxide Semiconductor Film Crystallization

Published online by Cambridge University Press:  04 August 2017

Kunji Shigeto ,
Takio Kizu ,
Kazuhito Tsukagoshi  and
Toshihide Nabatame
Kunji Shigeto
Affiliation:
Hitachi High-Technologies Corporation, Kawasaki, Japan.
Takio Kizu
Affiliation:
NIMS MANA, Tsukuba, Japan.
Kazuhito Tsukagoshi
Affiliation:
NIMS MANA, Tsukuba, Japan.
Toshihide Nabatame
Affiliation:
NIMS MANA, Tsukuba, Japan.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1512 - 1513
Copyright
© Microscopy Society of America 2017 

References

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