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Operando Scanning Electron and Microwave Microscopies in Plasmas: A Comparative Analysis

Published online by Cambridge University Press:  30 July 2020

Andrei Kolmakov  and
Alexander Tselev
Andrei Kolmakov
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland, United States
Alexander Tselev
Affiliation:
Department of Physics & CICECO–Aveiro Institute of Materials/ University of Aveiro, Aveiro, Aveiro, Portugal

Abstract

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Type
Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens - Probe Microscopy and Nanomechanics
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2498 - 2499
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Copyright
Copyright © Microscopy Society of America 2020

References

Tselev, A., Fagan, J., and Kolmakov, A., “In-situ near-field probe microscopy of plasma processing,” Applied Physics Letters, vol. 113, no. 26, p. 263101, 2018.10.1063/1.5049592CrossRefGoogle Scholar