Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-27T00:37:04.647Z Has data issue: false hasContentIssue false
  • English
  • Français

Offline Secondary Electron Counting and Conditional Re-illumination in SEM

Published online by Cambridge University Press:  30 July 2020

Akshay Agarwal ,
John Simonaitis ,
Vivek Goyal  and
Karl Berggren
Akshay Agarwal
Affiliation:
Massachusetts Institute of Technology, Cambridge, Massachusetts, United States
John Simonaitis
Affiliation:
Massachusetts Institute of Technology, Cambridge, Massachusetts, United States
Vivek Goyal
Affiliation:
Boston University, Boston, Massachusetts, United States
Karl Berggren
Affiliation:
Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Modeling, Simulation, and Artificial Intelligence in Microscopy and Microanalysis for Physical and Biological Systems
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1182 - 1184
Check for updates
Copyright
Copyright © Microscopy Society of America 2020

References

Stevens, L. Luzi, Yang, H., Kovarik, L., Mehdi, B. L., Liyu, A., Gehm, M. E., and Browning, N. D., Appl. Phys. Lett. 112, 043104 (2018).10.1063/1.5016192CrossRefGoogle Scholar
Dahmen, T., Engstler, M., Pauly, C., Trampert, P., De Jonge, N., Mücklich, F., and Slusallek, P., Sci. Rep. 6, 25350 (2016).10.1038/srep25350CrossRefGoogle Scholar
Jiang, Y., Chen, Z., Han, Y., Deb, P., Gao, H., Xie, S., Purohit, P., Tate, M. W., Park, J., Gruner, S. M., Elser, V., and Muller, D. A., Nature 559, 343 (2018).10.1038/s41586-018-0298-5CrossRefGoogle Scholar
Agarwal, A., Berggren, K. K., van Staaden, Y. J., and Goyal, V. K., Phys. Rev. A 99, 063809 (2019).10.1103/PhysRevA.99.063809CrossRefGoogle Scholar
Joy, D. C., in Biol. Low-Voltage Scanning Electron Microsc. (Springer New York, New York, NY, 2007), pp. 129–144.Google Scholar
Uchikawa, Y., Gouhara, K., Yamada, S., Ito, T., Kodama, T., and Sardeshmukh, P., J. Electron Microsc. (Tokyo). 41, 253 (1992).Google Scholar
Thong, J. T. L., Sim, K. S., and Phang, J. C. H., Scanning 23, 328 (2001).10.1002/sca.4950230506CrossRefGoogle ScholarPubMed
Sammut, C. and Webb, G. I., editors, in Encycl. Mach. Learn. (Springer US, Boston, MA, 2011), pp. 652–652.Google Scholar
Moerland, R. J., Weppelman, I. G. C., Garming, M. W. H., Kruit, P., and Hoogenboom, J. P., Opt. Express 24, 24760 (2016).10.1364/OE.24.024760CrossRefGoogle Scholar
The authors acknowledge funding from the Gordon and Betty Moore Foundation, and the U.S. NSF under grands 1422034 and 1815896, and useful discussions with the QEM-2 collaboration.Google Scholar