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A Novel Method for Direct TEM Study of Microstructure of Polysilicon Films Crystallized with and without Underlying Oxide

Published online by Cambridge University Press:  01 August 2002

Xiang-Zheng Bo ,
Nan Yao  and
James C. Sturm
Xiang-Zheng Bo
Affiliation:
Center for Photonic & Opti-Electronic Materials, Princeton University, Princeton, NJ 08544
Nan Yao
Affiliation:
Princeton Materials Institute, Princeton University, Princeton, NJ 08544
James C. Sturm
Affiliation:
Center for Photonic & Opti-Electronic Materials, Princeton University, Princeton, NJ 08544

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1210 - 1211
Copyright
Copyright © Microscopy Society of America 2002