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Novel FIB-less Fabrication of Electrical Devices for in-situ Biasing

Published online by Cambridge University Press:  04 August 2017

Rohan Dhall ,
Houston Dycus ,
Matthew Cabral ,
Everett Grimley ,
Weizong Xu ,
John Damiano  and
James M. LeBeau
Rohan Dhall
Affiliation:
Department of Material Science and Engineering, North Carolina State University, Raleigh, NC, USA
Houston Dycus
Affiliation:
Department of Material Science and Engineering, North Carolina State University, Raleigh, NC, USA
Matthew Cabral
Affiliation:
Department of Material Science and Engineering, North Carolina State University, Raleigh, NC, USA
Everett Grimley
Affiliation:
Department of Material Science and Engineering, North Carolina State University, Raleigh, NC, USA
Weizong Xu
Affiliation:
Department of Material Science and Engineering, North Carolina State University, Raleigh, NC, USA
John Damiano
Affiliation:
Protochips Inc., Morrisville, NC, USA
James M. LeBeau
Affiliation:
Department of Material Science and Engineering, North Carolina State University, Raleigh, NC, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1502 - 1503
Copyright
© Microscopy Society of America 2017 

References

[1] Voyles, P. M. J. L. Grazul & Muller, D. A. Imaging individual atoms inside crystals with ADF-STEM. Ultramicroscopy 96.3 2003 p251–273.Google Scholar