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New Developments in CrossBeam Technology

Published online by Cambridge University Press:  31 July 2006

H Hoffmeister ,
A Schertel ,
A Thesen  and
P Ginauck
H Hoffmeister
Affiliation:
Carl Zeiss SMT - Nano Technology Systems Division,73447 Oberkochen,Germany
A Schertel
Affiliation:
Carl Zeiss SMT - Nano Technology Systems Division,73447 Oberkochen,Germany
A Thesen
Affiliation:
Carl Zeiss SMT - Nano Technology Systems Division,73447 Oberkochen,Germany
P Ginauck
Affiliation:
Carl Zeiss SMT - Nano Technology Systems Division,73447 Oberkochen,Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1244 - 1245
Copyright
© 2006 Microscopy Society of America