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Neon-FIB for the Fabrication of Tips for Atom Probe Tomography and Electron Tomography

Published online by Cambridge University Press:  30 July 2020

Frances Allen ,
John Notte ,
Deying Xia ,
Paul Blanchard ,
Ruopeng Zhang ,
Andrew Minor  and
Norman Sanford
Frances Allen
Affiliation:
UC Berkeley, Berkeley, California, United States
John Notte
Affiliation:
Carl Zeiss, Peabody, Massachusetts, United States
Deying Xia
Affiliation:
Carl Zeiss, Peabody, Massachusetts, United States
Paul Blanchard
Affiliation:
NIST, Boulder, Colorado, United States
Ruopeng Zhang
Affiliation:
UC Berkeley, Berkeley, California, United States
Andrew Minor
Affiliation:
UC Berkeley and LBNL, Berkeley, California, United States
Norman Sanford
Affiliation:
NIST, Boulder, Colorado, United States

Abstract

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Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 184
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Copyright
Copyright © Microscopy Society of America 2020

References

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