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Nanoscale Structure-Property Relationship in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications

Published online by Cambridge University Press:  04 August 2017

Soohyun Im ,
Michelle M. Paquette ,
Mohammed Belhadj-Larbi ,
Paul Rulis ,
Ridwan Sakidja  and
Jinwoo Hwang
Soohyun Im
Affiliation:
Department of Materials Science and Engineering, The Ohio State University, Columbus, OH43212
Michelle M. Paquette
Affiliation:
Department of Physics and Astronomy, University of Missouri-Kansas City, Kansas City, MO64110
Mohammed Belhadj-Larbi
Affiliation:
Department of Physics and Astronomy, University of Missouri-Kansas City, Kansas City, MO64110
Paul Rulis
Affiliation:
Department of Physics and Astronomy, University of Missouri-Kansas City, Kansas City, MO64110
Ridwan Sakidja
Affiliation:
Physics, Astronomy, and Materials Science, Missouri State University, Springfield, MO65897
Jinwoo Hwang
Affiliation:
Department of Materials Science and Engineering, The Ohio State University, Columbus, OH43212

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1486 - 1487
Copyright
© Microscopy Society of America 2017 

References

[1] Nordell, B. J., et al., Advanced Electronic Materials 2(7), 1600073 2016.Google Scholar
[2] Paquette, M. M., et al., J. Phys.: Condens. Matter 23, 435002 2011.Google Scholar
[3] Hwang, J., et al., Phys. Rev. Lett. 108, 195505 2012.CrossRefGoogle Scholar