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Multi-Modal Processing of Graphene Towards Precisely Controlled Fabrication of a Nanoelectronic Device Using the Helium Ion Microscope and the TOF SIMS

Published online by Cambridge University Press:  04 August 2017

Songkil Kim ,
Anton V. Ievlev ,
Ivan V. Vlassiouk ,
Matthew J. Burch ,
Xiahan Sang ,
Chance Brown ,
Raymond R. Unocic ,
Alex Belianinov ,
Stephen Jesse  and
Olga S. Ovchinnikova
Songkil Kim
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Anton V. Ievlev
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Ivan V. Vlassiouk
Affiliation:
Energy & Transportation Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Matthew J. Burch
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Xiahan Sang
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Chance Brown
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Bredesen Center, University of Tennessee, Knoxville, TN 37996, USA.
Raymond R. Unocic
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Alex Belianinov
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Stephen Jesse
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Olga S. Ovchinnikova
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1720 - 1721
Copyright
© Microscopy Society of America 2017 

References

[1] Geim, A K & Novoselov, K S Nat. Mater 6 2007 183–191.Google Scholar
[2] Kuila, T, et al, Prog. Mater Sci 57 2012 1061–1106.Google Scholar
[3] Kim, S, et al, Nanoscale 7 2015 14946–14952.CrossRefGoogle Scholar
[4] Iberi, V, et al, Sci. Rep 5 2015 11952.CrossRefGoogle Scholar
[5] This work was supported by the Oak Ridge National Laboratory's Center for Nanophase Materials Sciences (CNMS), which is a U.S. Department of Energy, Office of Science User Facility.Google Scholar