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Modulated Nanostructure Characterization Using Aberration Corrected STEM

Published online by Cambridge University Press:  30 July 2020

Ray Carpenter
Affiliation:
Arizona State University, Mesa, Arizona, United States
Ronit Sawant
Affiliation:
Arizona State University, Tempe, Arizona, United States
Toshihiro Aoki
Affiliation:
University of California - Irvine, Irvine, California, United States

Abstract

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Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Copyright
Copyright © Microscopy Society of America 2020

References

Cahn, J. W. (1962), Acta Met.10, 179183.10.1016/0001-6160(62)90114-1CrossRefGoogle Scholar
Carpenter, R. W. (1967), Acta Met.15, 15671572.10.1016/0001-6160(67)90129-0CrossRefGoogle Scholar
Bentley, J. (1989), Ultramicros.30, 157171.10.1016/0304-3991(89)90183-6CrossRefGoogle Scholar
Crewe, A. V. et al. (1975), p. 47 in Physical Aspects of Electron Microscopy and Microbeam Analysis, ed. by Siegel, and Beaman, , Wiley, New York.Google Scholar
Krivanek, O. L. et al. (2008), Ultramicros.108, 179195.10.1016/j.ultramic.2007.07.010CrossRefGoogle Scholar
Wise, A. et al. (2008), App. Phy. Lett. 92, 261914.10.1063/1.2953451CrossRefGoogle Scholar
Treacy, M. M. J. (2011), Micros. Microanal.17, 847858.10.1017/S1431927611012074CrossRefGoogle Scholar
Hartel, P. et al. (1996), Ultramicros.63, 93114.10.1016/0304-3991(96)00020-4CrossRefGoogle Scholar