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Microstructure of Al/Ti Metallization Layers

Published online by Cambridge University Press:  05 September 2003

Matthias Hofmann ,
Thomas Gemming ,
Siegfried Menzel  and
Klaus Wetzig
Matthias Hofmann
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden, PF 270116, 01171 Dresden, Germany
Thomas Gemming
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden, PF 270116, 01171 Dresden, Germany
Siegfried Menzel
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden, PF 270116, 01171 Dresden, Germany
Klaus Wetzig
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden, PF 270116, 01171 Dresden, Germany
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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 250 - 251
Copyright
Copyright © Microscopy Society of America 2003

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