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Microreactor for Clean and Controlled In-situ SEM Imaging of CVD Processes

Published online by Cambridge University Press:  30 July 2020

Libor Novak ,
Petr Wandrol  and
Ernst Jan R. Vesseur
Libor Novak
Affiliation:
Thermo Fisher Scientific, Brno, Jihomoravsky kraj, Czech Republic
Petr Wandrol
Affiliation:
Thermo Fisher Scientific, Brno, Jihomoravsky kraj, Czech Republic
Ernst Jan R. Vesseur
Affiliation:
Thermo Fisher Scientific, Eindhoven, Noord-Brabant, Netherlands

Abstract

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Type
Approaching Operando Imaging of Functional Materials
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1144 - 1145
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Copyright
Copyright © Microscopy Society of America 2020

References

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