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Manganese Segregation Behavior in Damascene Metal Lines

Published online by Cambridge University Press:  04 August 2017

Guoda Lian ,
Malik Ali  and
Steve Boettcher
Guoda Lian
Affiliation:
IBM Inc., Hopewell Junction, NY, USA
Malik Ali
Affiliation:
IBM Inc., Hopewell Junction, NY, USA
Steve Boettcher
Affiliation:
IBM Inc., Hopewell Junction, NY, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1464 - 1465
Copyright
© Microscopy Society of America 2017 

References

[1] Hu, C.-K., et al, J. Appl. Phys. 111 2012). p. 093722.Google Scholar
[2] Laffonta, L. & Gibotb, P. Materials Characterization 61 2010). p. 1268.Google Scholar