Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-23T11:23:38.248Z Has data issue: false hasContentIssue false
  • English
  • Français

Inspection Tool for Testing an Electron Beam in an Electromagnetic Lens System

Published online by Cambridge University Press:  04 August 2017

Cheolsu Han ,
Jong-Man Jeong ,
Sang-Chul Lee  and
Jin-Gyu Kim
Cheolsu Han
Affiliation:
Electron Microscopy Research Center, Korea Basic Science Institute, Daejeon, Republic of Korea.
Jong-Man Jeong
Affiliation:
Electron Microscopy Research Center, Korea Basic Science Institute, Daejeon, Republic of Korea.
Jin-Gyu Kim
Affiliation:
Division of Environmental and Material Sciences, Korea Basic Science Institute, Daejeon, Republic of Korea.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 518 - 519
Copyright
© Microscopy Society of America 2017 

References

[1] Munro, E. in Handbook of Charged Particle optics, 1st ed CRC press NY 1997). Ch. I..Google Scholar
[2] Williams, David B., et al in Transmission Electron Microscopy: A Textbook for Materials Science. Springer 2009). Ch. 9.CrossRefGoogle Scholar
[3] Han, C., et al, Rev.Sci.Instrum. 88 2017). p. 023302.Google Scholar
[4] John, T. L. Thong in "ELECTRON BEAM TESTING TECHNOLOGY,". Plenum Press NY 1993.Google Scholar
[5] The authors acknowledge funding from Korea Basic Science Institute, Grant Number D36612.Google Scholar