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In-Situ Detection Of Stress Induced Voids In Thin Metallizations

Published online by Cambridge University Press:  05 September 2003

Matthias Wallrauch ,
Jörg Muchow ,
Hans-Reiner Krauß  and
Erich Plies
Matthias Wallrauch
Affiliation:
Robert Bosch GmbH, Tübingerstr. 123, D-72762 Reutlingen, Germany
Jörg Muchow
Affiliation:
Robert Bosch GmbH, Tübingerstr. 123, D-72762 Reutlingen, Germany
Hans-Reiner Krauß
Affiliation:
Robert Bosch GmbH, Tübingerstr. 123, D-72762 Reutlingen, Germany
Erich Plies
Affiliation:
Institut für Angewandte Physik, Auf der Morgenstelle 10, D-72076 Tübingen, Germany
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Abstract

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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 280 - 281
Copyright
Copyright © Microscopy Society of America 2003

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