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In-situ Correlative Analysis of Electrical and Mechanical Properties of 3D Nanostructures by Combination of AFM, SEM and FIB

Published online by Cambridge University Press:  30 July 2020

Christian Schwalb
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Pinar Frank
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Stefan Hummel
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Juergen Sattelkov
Affiliation:
TU Graz, Graz, Steiermark, Austria
Robert Winkler
Affiliation:
TU Graz, Graz, Steiermark, Austria
Johanna Huetner
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Oleg Domanov
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Georg Fantner
Affiliation:
EPFL, Lausanne, Vaud, Switzerland
Harald Plank
Affiliation:
TU Graz, Graz, Steiermark, Austria

Abstract

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Type
Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens - Surface Analysis and Spectroscopy II - Detection and Subtlety
Copyright
Copyright © Microscopy Society of America 2020

References

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Plank, H., Winkler, R., Schwalb, C. H., Hütner, J., Fowlkes, J. D., Rack, P. D., Utke, I., and Huth, M., Micromachines 11 (1), 48 (2020)Google Scholar