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In-situ Correlative Analysis of Electrical and Mechanical Properties of 3D Nanostructures by Combination of AFM, SEM and FIB

Published online by Cambridge University Press:  30 July 2020

Christian Schwalb ,
Pinar Frank ,
Stefan Hummel ,
Juergen Sattelkov ,
Robert Winkler ,
Johanna Huetner ,
Oleg Domanov ,
Georg Fantner  and
Harald Plank
Christian Schwalb
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Pinar Frank
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Stefan Hummel
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Juergen Sattelkov
Affiliation:
TU Graz, Graz, Steiermark, Austria
Robert Winkler
Affiliation:
TU Graz, Graz, Steiermark, Austria
Johanna Huetner
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Oleg Domanov
Affiliation:
GETec Microscopy GmbH, Vienna, Wien, Austria
Georg Fantner
Affiliation:
EPFL, Lausanne, Vaud, Switzerland
Harald Plank
Affiliation:
TU Graz, Graz, Steiermark, Austria

Abstract

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Type
Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens - Surface Analysis and Spectroscopy II - Detection and Subtlety
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1800 - 1801
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Copyright
Copyright © Microscopy Society of America 2020

References

Yablon, D., Werten, P., Winhold, M. and Schwalb, C.H., Microscopy and Analysis 31(2) 14-18 (2017)Google Scholar
Kreith, J., Strunz, T., Fantner, E.J., Fantner, G.E. and Cordill, M.J., Rev. Sci. Instr. 88 053704 (2017)10.1063/1.4983317CrossRefGoogle Scholar
Dukic, M., Adams, J. D. and Fantner, G.E., Scientific Reports 5 (2015) 16393.10.1038/srep16393CrossRefGoogle Scholar
Plank, H., Winkler, R., Schwalb, C. H., Hütner, J., Fowlkes, J. D., Rack, P. D., Utke, I., and Huth, M., Micromachines 11 (1), 48 (2020)Google Scholar