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Influence of SEM Deposited Protection Layers on FIB Induced Amorphous Damage of TEM Lamella Prepared by ExSolve WTP

Published online by Cambridge University Press:  01 August 2018

M. Najarían ,
Mauricio ,
Gordillo  and
Gavin Dutrow
M. Najarían
Affiliation:
Thermo Fisher Scientific, Materials & Structural Analysis, Hillsboro, USA
Gordillo
Affiliation:
Thermo Fisher Scientific, Materials & Structural Analysis, Hillsboro, USA
Gavin Dutrow
Affiliation:
Thermo Fisher Scientific, Materials & Structural Analysis, Hillsboro, USA

Abstract

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Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1120 - 1121
Copyright
© Microscopy Society of America 2018