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In Situ SEM Investigation of Al and Cu SAW Devices Behaviour under High Power Load

Published online by Cambridge University Press:  05 September 2003

M. Pekarcikova ,
S. Menzel ,
H. Schmidt  and
K. Wetzig
M. Pekarcikova
Affiliation:
Leibniz Institute for Solid State and Materials Research Dresden, D-01069 Dresden, Germany
S. Menzel
Affiliation:
Leibniz Institute for Solid State and Materials Research Dresden, D-01069 Dresden, Germany
H. Schmidt
Affiliation:
Leibniz Institute for Solid State and Materials Research Dresden, D-01069 Dresden, Germany
K. Wetzig
Affiliation:
Leibniz Institute for Solid State and Materials Research Dresden, D-01069 Dresden, Germany
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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 264 - 265
Copyright
Copyright © Microscopy Society of America 2003

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