Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-06T09:16:25.363Z Has data issue: false hasContentIssue false
  • English
  • Français

In Situ Nanoprobing Tools for Fault Localization and Defect Characterization

Published online by Cambridge University Press:  04 August 2017

Andrew J. Smith ,
Andreas Rummel ,
Matthias Kemmler ,
Klaus Schock  and
Stephan Kleindiek
Andrew J. Smith
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Andreas Rummel
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Matthias Kemmler
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Klaus Schock
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Stephan Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1432 - 1433
Copyright
© Microscopy Society of America 2017 

References

[1] Ring, R., et al, ISTFA 2015: Proceedings from the 41st International Symposium for Testing and Failure Analysis.Google Scholar
[2] Ledig, J, Wang, X, Fimdling, S, Schuhmann, H, Seibt, M, Jahn, U, Wehmann, H & Waag, A Phys. Status Solidi A 1–8 2015). p. 1–8.Google Scholar
[3] Kemmler, M, Rummel, A, Schock, K & Kleindiek, S (2015). IEEE 22nd International Symposium on the Journal Physical and Failure Analysis of Integrated Circuits (IPFA).Google Scholar