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In Situ Nanoprobing Tools for Fault Localization and Defect Characterization

Published online by Cambridge University Press:  04 August 2017

Andrew J. Smith ,
Andreas Rummel ,
Matthias Kemmler ,
Klaus Schock  and
Stephan Kleindiek
Andrew J. Smith
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Andreas Rummel
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Matthias Kemmler
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Klaus Schock
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Stephan Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1432 - 1433
Copyright
© Microscopy Society of America 2017 

References

[1] Ring, R., et al, ISTFA 2015: Proceedings from the 41st International Symposium for Testing and Failure Analysis.Google Scholar
[2] Ledig, J, Wang, X, Fimdling, S, Schuhmann, H, Seibt, M, Jahn, U, Wehmann, H & Waag, A Phys. Status Solidi A 1–8 2015). p. 1–8.Google Scholar
[3] Kemmler, M, Rummel, A, Schock, K & Kleindiek, S (2015). IEEE 22nd International Symposium on the Journal Physical and Failure Analysis of Integrated Circuits (IPFA).Google Scholar