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How to Avoid Artifacts in Nanobeam Diffraction Strain Measurements

Published online by Cambridge University Press:  04 August 2017

B. Fu ,
M. Gribelyuk ,
Frieder H. Baumann  and
Yun-yu Wang
B. Fu
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA 12020
M. Gribelyuk
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA 12020
Frieder H. Baumann
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA 12020
Yun-yu Wang
Affiliation:
GLOBALFOUNDRIES, 2070 Route 52, Hopewell Junction, NY 12533

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1420 - 1421
Copyright
© Microscopy Society of America 2017 

References

[1] Beche, A., et al, Applied Physics Letters 95 2009). p. 123114.CrossRefGoogle Scholar
[2] Fu, B., et al, Microsc. Microanal 22(Suppl 3 2016). p. 1618.CrossRefGoogle Scholar
[3] Hytch, M., et al, Nature 453 2008). pp. 1086.CrossRefGoogle Scholar
[4] Baumann, F. H. Applied Physics Letters 104 2014). p. 262102.CrossRefGoogle Scholar
[5] The image processing using Python scripts includes: using the direct center spot in the diffraction patterns as a template and applying an edge filter to find real center of all the diffraction disks.Google Scholar
[6] Vincent, R, et al, Ultramicroscopy 53 1994). p. 271.CrossRefGoogle Scholar