Growth Mechanisms of Electron Beam Induced Carbon Deposition Using Hydrocarbon Contamination

A D Garetto; D D Griffis; P E Russell; P D Rack; J Fowlkes

doi:10.1017/S1431927605503325

Growth Mechanisms of Electron Beam Induced Carbon Deposition Using Hydrocarbon Contamination

Published online by Cambridge University Press: 01 August 2005

P D Rack and

A D Garetto: Affiliation:
North Carolina State University
D D Griffis: Affiliation:
North Carolina State University
P E Russell: Affiliation:
North Carolina State University
P D Rack: Affiliation:
University of Tennessee
J Fowlkes: Affiliation:
University of Tennessee

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type: Research Article
Information: Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 850 - 851

DOI: https://doi.org/10.1017/S1431927605503325 [Opens in a new window]

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Growth Mechanisms of Electron Beam Induced Carbon Deposition Using Hydrocarbon Contamination

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