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From Photons to Electrons - A Correlative Workflow for Analysis and Preparation of Embedded Samples Using the LaserFIB

Published online by Cambridge University Press:  30 July 2020

Tobias Volkenandt ,
Fabián Pérez Willard ,
Marcus Kaestner ,
Sascha Mueller  and
Benjamin Tordoff
Tobias Volkenandt
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wurttemberg, Germany
Fabián Pérez Willard
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wurttemberg, Germany
Marcus Kaestner
Affiliation:
Carl Zeiss SMT GmbH, Oberkochen, Baden-Wurttemberg, Germany
Sascha Mueller
Affiliation:
Carl Zeiss SMT GmbH, Oberkochen, Baden-Wurttemberg, Germany
Benjamin Tordoff
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wurttemberg, Germany

Abstract

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Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 380 - 381
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Copyright
Copyright © Microscopy Society of America 2020