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Focused Ion Beam Based Micromanipulation to Form Air Bridge Interconnect

Published online by Cambridge University Press:  31 July 2006

C Progl ,
J Vitarelli  and
PE Russell
C Progl
Affiliation:
North Carolina State University
J Vitarelli
Affiliation:
Materials Analytical Services
PE Russell
Affiliation:
North Carolina State University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1278 - 1279
Copyright
© 2006 Microscopy Society of America