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Flattening of the Si-SiO2 Interface in Ultra-Thin SIMOX Structures

Published online by Cambridge University Press:  01 August 2005

T Jutarosaga  and
S Seraphin
T Jutarosaga
Affiliation:
University of Arizona
S Seraphin
Affiliation:
University of Arizona

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 1794 - 1795
Copyright
© 2005 Microscopy Society of America