Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-26T06:58:11.769Z Has data issue: false hasContentIssue false

Fixturing Options for Atom Probe Tomography

Published online by Cambridge University Press:  30 July 2020

Katherine Rice
Affiliation:
CAMECA Instruments, Inc., Madison, Wisconsin, United States
Yimeng Chen
Affiliation:
CAMECA Instruments, Inc., Madison, Wisconsin, United States
Robert Ulfig
Affiliation:
CAMECA Instruments, Inc., Madison, Wisconsin, United States
Tsuyoshi Onishi
Affiliation:
Hitachi High-Tech Corporation, Tokyo, Tokyo, Japan

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Vendor Symposium
Copyright
Copyright © Microscopy Society of America 2020

References

Larson, D. J., et al. “Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures.” Nanotechnology 10.1 (1999): 45.10.1088/0957-4484/10/1/010CrossRefGoogle Scholar
Gorman, Brian P., et al. “Hardware and techniques for cross-correlative TEM and atom probe analysis.” Microscopy Today 16.4 (2008): 4247.10.1017/S1551929500059782CrossRefGoogle Scholar