Hostname: page-component-6d856f89d9-nr6nt Total loading time: 0 Render date: 2024-07-16T05:01:17.907Z Has data issue: false hasContentIssue false
  • English
  • Français

Fast Fabrication of Micropillars for Micromechanical Testing Using a Combined fs-Laser – FIB/SEM Approach

Published online by Cambridge University Press:  22 July 2022

Tim Schubert ,
Fang Zhou ,
Renato Pero ,
Nicolas Randall ,
Timo Bernthaler  and
Gerhard Schneider
Tim Schubert*
Affiliation:
Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany
Fang Zhou
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wuerttemberg, Germany
Renato Pero
Affiliation:
Alemnis AG, Thun, Switzerland
Nicolas Randall
Affiliation:
Alemnis AG, Thun, Switzerland
Timo Bernthaler
Affiliation:
Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany
Gerhard Schneider
Affiliation:
Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany
*
*Corresponding author: [email protected]

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Ultrashort Pulse Lasers: Microscopy, Simulations, and Material Interactions
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 892 - 895
Check for updates
Copyright
Copyright © Microscopy Society of America 2022

References

Barnett, R., Mueller, S. and Hiller, S. et al. , Optics and Lasers in Engineering 127 (2020). doi:10.1016/j.optlaseng.2019.105941CrossRefGoogle Scholar
Volkenandt, T., Laquerre, A. et al. , Microscopy and Microanalysis 22 (2016), doi:10.1017/S143192761600180X.CrossRefGoogle Scholar