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Extract High Resolution 3D Quantitative Elemental Map Using a Combined HAADF-STEM and EDS Tomography

Published online by Cambridge University Press:  30 July 2020

Yu Yuan
Affiliation:
McGill University, Montreal, Quebec, Canada
Nicolas Brodusch
Affiliation:
McGill University, Montreal, Quebec, Canada
Frédéric Voisard
Affiliation:
McGill University, Montreal, Quebec, Canada
Boris Nijikovsky
Affiliation:
Facility for Electron Microscopy Research, McGill University, Montreal, Quebec, Canada
Audrey Moores
Affiliation:
McGill University, Montreal, Quebec, Canada
Raynald Gauvin
Affiliation:
McGill University, Montreal, Quebec, Canada

Abstract

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Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Copyright
Copyright © Microscopy Society of America 2020

References

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